Level: Beginner
【Presenter】
Applied Materials
Module Process Engineer, Huang Yu Lin
Cusomer Quality Engineer, Wayne Chou
[Presentation summary]
This Project is to improve the Cpk by reducing the particle generated in PECVD with time. The particle problem leads to yield loss and high cost of production. The whole production time is devide into 3 stages. (1) Fit particle data with JMP Poisson & ZIP Distribution. (2) Combine particle data with JMP Goal Plot, Performance Plot & SPC Control Chart. (3) Compare the performance with Dunnett's Method. (4) Combine Poisson Distribution with Goal Plot to modify the action plan for the next stages.
This project aims to reduce particles generated by PECVD over time and improve Cpk. Particle problems lead to lower yields and higher manufacturing costs. Divide the entire production time into three stages. (1) Fit particle data with JMP Poisson distribution and ZIP distribution. (2) Combine particle data using JMP goal plots, performance plots, and SPC control charts. (3) Compare performance using Dunnett's Method. (4) Modify the action plan for the next stage by combining the Poisson distribution and the goal plot.
[Presenter profile]
Module Process Engineer from Applied Materials Corp., in JMP process. River had been a PECVD (Plasma Enhance Chemical Vapor Deposition) engineer since 2015 for 5 years and as module process engineer since 2021 for 1 years. River's research focus on defect /variability / COO reduction and Process Cpk /Matching /Output optimization; Identify opportunities or increase values for Applied service with those learnings.
Module process engineer for JMP process at Applied Materials Corporation. I have worked as a PECVD (Plasma Enhance Chemical Vapor Deposition) engineer for 5 years since 2015 and as a module process engineer for 1 year since 2021. Our research themes are reducing defects, variation, and COO, and optimizing process Cpk, matching, and output. Through these learnings, we are focusing on identifying opportunities for Applied Materials' services and increasing value. .
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