Hi,
I have an interesting situation (at least to me) for a DOE. I need to design an experiment with 13 variables. Variable X1 and X2 (both numeric) cannot be in the experiment at the same time. If X2 is selected then the X2*X3 <= 1200. Furthermore, the ratio of X6 to X5 must be a whole number.
The goal of the experiment is to improve wafer uniformity as measured by etch depth across the diameter of the wafer.
No other constraints on the other variables (all numeric).
What would be the best design for this situation?
Thanks,
