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How to create a finer mesh for a surface plot?

I want to create a wafer map in 3D. That's easy with the points I have in the table, but I want a more granulated mesh in the surface. Therefore I need to interpolate over x and over y to get values for the new grid points. 

I saw the scritp function MapGrid2(un, u1, u2, vn, v1, v2), and EvalMesh2(mode, i1, i2, j1, j2), but I thought there is a simple way to generate a mesh with values. 

 

Thanks,

Martin

PS: I thought also about using NN to build a function and simulate a new table, but that seemed to inefficient

Re: How to create a finer mesh for a surface plot?You could create a column in your grid table with a formula for distance from center and then use that to exclude anything greater than the radius.Re: How to create a finer mesh for a surface plot?Hmm, if I save the grid I will get a homogeneous grid loosing the edges I had before. Can I just interpolate within the area given by the data?Re: How to create a finer mesh for a surface plot?

They are used to a result like the attached. But I like the contour plot option. 

Re: How to create a finer mesh for a surface plot?

Does it need to be 3D? If you use contour plot you can do a fit and then use the grid in contour plot to interpolate to any resolution that you’d like.

Made with the Semiconductor Toolkit.Made with the Semiconductor Toolkit.