Level: Advanced
Andrew Connell, Senior Engineer, Seagate
Definitive screening designs (DSDs) allow an experimenter to study the effects of a large number of factors in a relatively small design of experiment (DOE). In simple terms, DSDs are an improvement on standard screening designs (like the Plackett-Burman) in that they can prevent confounding of factors and also detect non-linear responses. DOE validation approaches involve an iterative Six Sigma guided modelling methodology for data exploration and process development. DSDs enable the experimenter to identify main effects, quadratics and interactions without aliasing. This presentation will initially explore the general experimental concepts and aims of the work and the inception of experimental design space data. The presentation will quickly progress to focus on the development of a new Chemical Mechanical Planarization (CMP) process for bulk titanium to make nanofabrication grade wafer substrate surfaces using DSD, and subsequent custom augmentation of the DSD to test and arrive at a robust 3rd order process model.
